A proportional solenoid valve that controls flow rate in proportion to the electric current.
Ultra-compact 10 mm width, silent design.Contributes to equipment space saving.
[Ultra-compact]
10 mm coil width.
Can be installed near the controlled object.
[Flow Rate Adjustment Range: 0 to 9 L/min]
Proportional control of minute flow rates is possible.
*Hysteresis
12 VDC: 10%
24 V: 20%
[Semiconductor Front-End Process]
Can be used in processes such as semiconductor resist coating, where space-saving components are required.
