[Oil-prohibited specifications]
Precision cleaning is performed on the gas contact parts, and the manufacturing processes from assembling to packaging are completed in clean rooms.
No grease is used in gas-contacting parts.

[Large flow rate / compact body]
A large flow rate of 0.8 ㎥/min. is realized even with just a 50 mm double-sided interface.
(Flow rate at 0.7 MPa primary pressure, 0.5 MPa set pressure, 0.1 MPa pressure drop)

[With reverse function]
This function reverses secondary pressure to the primary side when primary pressure is exhausted.
Safety-oriented, with no residual pressure on the secondary side. (When back pressure is not applied)