CKD Compact vacuum regulator VSRVV
Push-lock compact vacuum regulator.
特点和优点

[One-push lock]
Pressure adjustments can be easily made with one hand. Locking is done with a single push.

[50% lighter]
The body is made of resin and the metal materials are made of aluminum. Up to 50% lighter than conventional CKD products.

[Copper not used]
SUS and aluminum alloy are used in flow path parts, making it ideal for applications susceptible to copper ions.

[Ozone-resistant materials are used as standard]
Special NBR has been adopted. Ozone-resistant materials are used as standard for the valve and diaphragm parts to prevent deterioration.


规格参数
Model No.Product nameRemarks
VSRVV-※ZPush locking type


配置
行业
Handling
Assembly
Transfer
Inspection
Installation
Semiconductor manufacturing process (post-process)
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