辅助元件
CKD Glass float module GFM
Float plate that enables non-contact floating transport.
Select from 5 types of rails and pads according to various applications.
特点和优点

[Non-contact floating transport]
By adopting a new porous material, stable floating is achieved.
Smooth transport is possible without touching the workpiece.
Antistatic protection for workpieces is also possible.

[Improved visibility]
The use of a black body prevents diffused reflection and improves the visibility of the workpiece.
Ideal for high-sensitivity inspection.
Suppression of particles in floating air is realized.

[Selectable according to applications]
Float pad and rail type can be freely selected according to the application, such as precision floating, rough transport, or process loader.


规格参数
Model No.Product nameFloat (guideline)ApplicationsRemarks
GFM-AFloating alignment pad10 μm or morePositioning
GFM-THigh float rail250 μm or moreRough transport
GFM-RFFloat rail250 μm or moreTransport
GFM-RSFloat rail150 μm or moreLoader and unloader
GFM-PPrecision floating stage30 μm or moreVarious processes

 

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