Compact and lightweight, vacuum switching unit with height dimension especially compact.
[Effective cross-sectional area of vacuum valve] 0.4 (㎟)
[Compact and lightweight]
Ideal for restricted mounting space.
Product height is reduced.
[Fast and stable response]
Adopts a direct acting valve for the main valve to realize high-speed and stable response.
(ON/OFF = 5 mm/sec or less)
[Four types of pressure sensors available]
Four types of analog output are available for the pressure sensor.
