Compact body with a width of 10.5 mm, a vacuum switching unit that can be compactly installed even for use in multiple stations.
[Effective cross-sectional area of vacuum valve]
2-way valve specification : 3.5, 4.5 (㎟)
3-way valve specification : 3.0,
[Lightweight and compact]
Compact body with a width of 10.5 mm that can be compactly installed even for use in multiple stations.
Fixing methods include direct mount, side fixing with screws, etc., and DIN rail mount for mounting on a DIN rail.
[Vacuum burst time dramatically reduced]
3-port valve specification has greatly reduced the time required to go from vacuum to atmospheric pressure (vacuum burst time) by using a 3-port valve for the vacuum supply main valve.

