• Mass Flow Measurement

Independent of the temperature and pressure of air and gas used, the flow can be measured and converted to standard conditions.
(* Flow at standard conditions refers to the volumetric flow at 1 atmosphere pressure and 0°C (or 20°C)).

• Wide Measurement Range

In the low-flow region relative to the maximum measurement flow, conventional gas flow meters are generally difficult to measure. By using a μF sensor, a wide range of measurement and control can be achieved. The CMS mass flow meter achieves a turndown ratio of 100:1, and the CML high-flow mass flow meter achieves a turndown ratio of 160:1 (measurement range of 1,280:1)! It is ideal for managing the usage of air and gas and for energy-saving leak management.

• Fast Response

The sensor is in direct contact with the gas for detection, providing a quick response.

• Low Pressure Loss Design

The μF sensor is mounted on the wall of the flow path, minimizing obstruction to fluid flow and resulting in low pressure loss. It is most suitable for measuring and controlling low-pressure gas flow.

• High Accuracy

The mass flow meter uses RD (Reading) accuracy standards, enabling high-precision measurement across a wide flow range.

• Various Functions

By utilizing microcomputer technology accumulated from control machines, it incorporates various functions not available in previous mass flow meters: instantaneous/cumulative flow display, gas type switching function, upper/lower limit alarm output, analog output, cumulative pulse output, communication functions, etc. (* Depending on the product)

• Wide Range of Products

Products are available for a wide flow range, from 0–500 mL/min to 0–1600 m³/h, depending on the application.