• Mass Flow Measurement

Independent of the operating temperature and pressure of air or gas, it can measure and convert to flow at standard conditions.
(* Flow at standard conditions refers to the volumetric flow rate at 1 atmosphere and 0°C (or 20°C).)

• Wide Measurement Range

General gas flow meters struggle to detect low flow rates relative to their maximum measurement range. By incorporating μF sensors, a wide measurement and control range can be achieved. This allows the adjustable ratio of CMS mass flow meters to reach 100:1, and CML high-flow mass flow meters to reach 160:1 (measurement range 1,280:1)! It is ideal for managing the use of air and gas, as well as energy-saving leak management.

• Fast Response

The MEMS sensor has a very small thermal capacity and directly contacts the gas for detection, achieving a fast response.

• Low Pressure Loss Design

The μF sensor is installed on the wall of the flow path, providing the advantage of low pressure loss. It is most suitable for detecting and controlling low-pressure gas flows.

• High Accuracy

The μF sensor exhibits minimal characteristic changes over time, maintaining high accuracy over the long term.

• Various Functions

By utilizing microcomputer control technology accumulated in machines, a variety of functions not available in earlier mass flow meters are integrated. These include instantaneous/cumulative flow display, gas type switching, upper/lower limit alarm output, analog output, cumulative pulse output, communication functions, etc. (* Functions may vary depending on the product)

• Wide Range of Products

Products are available across a wide flow range according to usage, from 5 mL/min models to 500 L/min models.